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Lasers carve precision microscale featuresLERNER, E. J.Laser focus world. 1999, Vol 35, Num 9, pp 87-91, issn 1043-8092, 4 p.Article

Spark Erosion for fabrication of micromechanical components : Evaluation of possibilities and limitsHERBST, P; POPOVIC, G; DETTER, H et al.International conference on microelectronic. 1997, pp 539-542, isbn 0-7803-3664-X, 2VolConference Paper

A positional accuracy study of a micro-EDM machineALMOND, H; BHOGAL, J; ALLEN, D. M et al.SPIE proceedings series. 1999, pp 1113-1124, isbn 0-8194-3154-0, 2VolConference Paper

Micro-usinage des matériaux monocristallins = Monocrystalline material micromachiningDANEL, Jean-Sébastien.Techniques de l'ingénieur. Génie mécanique. 1998, Vol BT2, Num BM7290, pp BM7290.1-BM7290.18, issn 1762-8768Article

Improved construction method of a surface micro-machined pin-jointed actuator-tool using only two mechanical layersSAUCEDO-FLORES, Emmanuel; RUELAS, Rubén; CONTRERAS-NUNO, Alejandro et al.SPIE proceedings series. 2004, pp 248-255, isbn 0-8194-5306-4, 8 p.Conference Paper

A novel 3D process for single-crystal silicon micro-probe structuresPARK, Sangjun; KIM, Bonghwan; KIM, Jongpal et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 650-654, issn 0960-1317Article

Combining the best of bulk and surface micromachining using Si {111} substratesFLEMING, J. G.SPIE proceedings series. 1998, pp 162-168, isbn 0-8194-2970-8Conference Paper

Micromachining and microfabrication process technology IX (San Jose CA, 27-29 January 2004)Maher, Mary Ann; Jakubczak, Jerome F.SPIE proceedings series. 2004, isbn 0-8194-5250-5, XXII, 276 p, isbn 0-8194-5250-5Conference Proceedings

Experimentation of an electrostatically actuated monochip micropump for drug deliveryDILHAN, M; TASSELLI, J; ESTEVE, D et al.SPIE proceedings series. 1999, pp 887-896, isbn 0-8194-3154-0, 2VolConference Paper

Micromachining for silicon microaccelerometerBHAT, K. N.SPIE proceedings series. 1998, pp 262-273, isbn 0-8194-2762-4Conference Paper

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Joint Tokyo-Warwick Biennial Nanotechnology SymposiumDAVIES, S. T; MIYAMOTO, I.Nanotechnology (Bristol. Print). 1998, Vol 9, Num 2, issn 0957-4484, 96 p.Conference Proceedings

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Fabrication of micro torsional actuator using surface plus bulk micromachining processesHSIEH, J; WEILEUN FANG.SPIE proceedings series. 1998, pp 368-376, isbn 0-8194-2973-2Conference Paper

Design space of single-loop planar folded micro mechanisms with out-of-plane motionLUSK, Craig P; HOWELL, Larry L.Journal of mechanical design (1990). 2006, Vol 128, Num 5, pp 1092-1100, issn 1050-0472, 9 p.Article

Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planesSCHRÖPFER, G; DE LABACHELERIE, M; TELLIER, C. R et al.Microsystem technologies. 1999, Vol 5, Num 4, pp 194-199, issn 0946-7076Article

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A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applicationsJERWEI HSIEH; WEILEUN FANG.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 574-581, issn 0960-1317Article

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Recent developments in micromilling using focused ion beam technologyTSENG, Ampere A.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 4, pp R15-R34, issn 0960-1317Article

Microfabricated substrates for eukariotic cells adherenceVASILCO, R; MANEA, E; POPESCU, A. M et al.International Semiconductor Conference. 2004, pp 279-282, isbn 0-7803-8499-7, 4 p.Conference Paper

Fabrication of out-of-plane curved surfaces in si by utilizing rie lagCHOU, Tsung-Kuan A; NAJAFI, Khalil.Proceedings, IEEE micro electro mechanical systems. 2002, pp 145-148, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

High aspect ratio nano fluidic channels by laser-controlled fracturingHUI, Allan P; QIN, Shui-Jie; LI, Wen J et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 156-159, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper